Design and micromachining of a stretchable two-dimensional ultrasonic array

Focused ultrasound using stretchable ultrasonic arrays is a very attractive method for ultrasound neuromodulation. However, the structure and fabrication of the arrays have brought great challenges for the development of stretchable ultrasonic arrays. In this work, an improved 6 × 6 stretchable two-...

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Autores principales:	Wei Liu, Weicen Chen, Chunling Zhu, Dawei Wu
Formato:	article
Lenguaje:	EN
Publicado:	Elsevier 2021
Materias:	Stretchable ultrasonic array Serpentine hinge Laser micromachining Three-dimensional scanning Spatial focusing Electronics TK7800-8360 Technology (General) T1-995
Acceso en línea:	https://doaj.org/article/e627f3c3ea5744e781e23455f570aaff
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id	oai:doaj.org-article:e627f3c3ea5744e781e23455f570aaff
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spelling	oai:doaj.org-article:e627f3c3ea5744e781e23455f570aaff2021-11-12T04:46:31ZDesign and micromachining of a stretchable two-dimensional ultrasonic array2590-007210.1016/j.mne.2021.100096https://doaj.org/article/e627f3c3ea5744e781e23455f570aaff2021-11-01T00:00:00Zhttp://www.sciencedirect.com/science/article/pii/S2590007221000174https://doaj.org/toc/2590-0072Focused ultrasound using stretchable ultrasonic arrays is a very attractive method for ultrasound neuromodulation. However, the structure and fabrication of the arrays have brought great challenges for the development of stretchable ultrasonic arrays. In this work, an improved 6 × 6 stretchable two-dimensional ultrasonic array has been proposed based on laser micromachining technology. The structure and shape of the serpentine hinge are optimized to avoid delamination between layers and to reduce the stress concentration during the stretching process. Due to the thorough studies over the effects of laser parameters on the kerf profile, clean and accurate serpentine hinge shapes can be obtained conveniently. Array elements are connected using serpentine hinges to form a stretchable two-dimensional structure. Thus, a reliable electrical connection and stable array structure are formed, which can provide 100% yield and excellent mechanical stretchability. Based on the three-dimensional scanning guidance, simulation results of ultrasonic spatial focusing on a complex surface demonstrate that our device has promising applications for ultrasound neuromodulation.Wei LiuWeicen ChenChunling ZhuDawei WuElsevierarticleStretchable ultrasonic arraySerpentine hingeLaser micromachiningThree-dimensional scanningSpatial focusingElectronicsTK7800-8360Technology (General)T1-995ENMicro and Nano Engineering, Vol 13, Iss , Pp 100096- (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Stretchable ultrasonic array Serpentine hinge Laser micromachining Three-dimensional scanning Spatial focusing Electronics TK7800-8360 Technology (General) T1-995
spellingShingle	Stretchable ultrasonic array Serpentine hinge Laser micromachining Three-dimensional scanning Spatial focusing Electronics TK7800-8360 Technology (General) T1-995 Wei Liu Weicen Chen Chunling Zhu Dawei Wu Design and micromachining of a stretchable two-dimensional ultrasonic array
description	Focused ultrasound using stretchable ultrasonic arrays is a very attractive method for ultrasound neuromodulation. However, the structure and fabrication of the arrays have brought great challenges for the development of stretchable ultrasonic arrays. In this work, an improved 6 × 6 stretchable two-dimensional ultrasonic array has been proposed based on laser micromachining technology. The structure and shape of the serpentine hinge are optimized to avoid delamination between layers and to reduce the stress concentration during the stretching process. Due to the thorough studies over the effects of laser parameters on the kerf profile, clean and accurate serpentine hinge shapes can be obtained conveniently. Array elements are connected using serpentine hinges to form a stretchable two-dimensional structure. Thus, a reliable electrical connection and stable array structure are formed, which can provide 100% yield and excellent mechanical stretchability. Based on the three-dimensional scanning guidance, simulation results of ultrasonic spatial focusing on a complex surface demonstrate that our device has promising applications for ultrasound neuromodulation.
format	article
author	Wei Liu Weicen Chen Chunling Zhu Dawei Wu
author_facet	Wei Liu Weicen Chen Chunling Zhu Dawei Wu
author_sort	Wei Liu
title	Design and micromachining of a stretchable two-dimensional ultrasonic array
title_short	Design and micromachining of a stretchable two-dimensional ultrasonic array
title_full	Design and micromachining of a stretchable two-dimensional ultrasonic array
title_fullStr	Design and micromachining of a stretchable two-dimensional ultrasonic array
title_full_unstemmed	Design and micromachining of a stretchable two-dimensional ultrasonic array
title_sort	design and micromachining of a stretchable two-dimensional ultrasonic array
publisher	Elsevier
publishDate	2021
url	https://doaj.org/article/e627f3c3ea5744e781e23455f570aaff
work_keys_str_mv	AT weiliu designandmicromachiningofastretchabletwodimensionalultrasonicarray AT weicenchen designandmicromachiningofastretchabletwodimensionalultrasonicarray AT chunlingzhu designandmicromachiningofastretchabletwodimensionalultrasonicarray AT daweiwu designandmicromachiningofastretchabletwodimensionalultrasonicarray
_version_	1718431261878386688

Design and micromachining of a stretchable two-dimensional ultrasonic array

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