Evaluation of Friction Durability of Extremely Thin Diamond-Like Carbon Films by Statistical Cluster and Regression Analyses of Friction Coefficient
We studied the tribological properties of extremely thin DLC films at high temperature. The films were deposited on nickel phosphorus (NiP) or Si substrates using filtered cathodic vacuum arc (FCVA) or plasma chemical vapor deposition (P-CVD). The nanoindentation hardness values and elastic moduli o...
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| Autores principales: | , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Japanese Society of Tribologists
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/e641e74484204ea6991ab8630d5ffbc1 |
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