Progress of optomechanical micro/nano sensors: a review

Optomechanical sensing based on the coupling between mechanical motions and optical resonances has attracted huge interest in sensor applications due to its small footprint, high sensitivity, low detection limit, and electromagnetic immunity. Optomechanical sensors that detect from mechanical motion...

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Autores principales:	Xinmiao Liu, Weixin Liu, Zhihao Ren, Yiming Ma, Bowei Dong, Guangya Zhou, Chengkuo Lee
Formato:	article
Lenguaje:	EN
Publicado:	Taylor & Francis Group 2021
Materias:	optomechanical sensors physical sensing chemical sensing molecular vibration photothermal effect Materials of engineering and construction. Mechanics of materials TA401-492 Applied optics. Photonics TA1501-1820
Acceso en línea:	https://doaj.org/article/e70d65a5d20d4905b42712efb2f7d7be
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spelling	oai:doaj.org-article:e70d65a5d20d4905b42712efb2f7d7be2021-11-04T15:00:42ZProgress of optomechanical micro/nano sensors: a review1559-96121559-962010.1080/15599612.2021.1986612https://doaj.org/article/e70d65a5d20d4905b42712efb2f7d7be2021-01-01T00:00:00Zhttp://dx.doi.org/10.1080/15599612.2021.1986612https://doaj.org/toc/1559-9612https://doaj.org/toc/1559-9620Optomechanical sensing based on the coupling between mechanical motions and optical resonances has attracted huge interest in sensor applications due to its small footprint, high sensitivity, low detection limit, and electromagnetic immunity. Optomechanical sensors that detect from mechanical motion at µm scale to molecular vibration at nm scale have found various applications such as force, inertia, acoustic, chemical, and thermal sensing, etc. In this review, we provide an overview of the recent progress of optomechanical sensors. Three development fields of optomechanical sensors are reviewed, which are passive optomechanical sensors, electro-optomechanical sensing platforms, and molecular vibration sensing schemes. The sensor configurations, applications, and integrations are described. In the end, we also provide our perspectives on the future development directions of optomechanical sensors.Xinmiao LiuWeixin LiuZhihao RenYiming MaBowei DongGuangya ZhouChengkuo LeeTaylor & Francis Grouparticleoptomechanical sensorsphysical sensingchemical sensingmolecular vibrationphotothermal effectMaterials of engineering and construction. Mechanics of materialsTA401-492Applied optics. PhotonicsTA1501-1820ENInternational Journal of Optomechatronics, Vol 15, Iss 1, Pp 120-159 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	optomechanical sensors physical sensing chemical sensing molecular vibration photothermal effect Materials of engineering and construction. Mechanics of materials TA401-492 Applied optics. Photonics TA1501-1820
spellingShingle	optomechanical sensors physical sensing chemical sensing molecular vibration photothermal effect Materials of engineering and construction. Mechanics of materials TA401-492 Applied optics. Photonics TA1501-1820 Xinmiao Liu Weixin Liu Zhihao Ren Yiming Ma Bowei Dong Guangya Zhou Chengkuo Lee Progress of optomechanical micro/nano sensors: a review
description	Optomechanical sensing based on the coupling between mechanical motions and optical resonances has attracted huge interest in sensor applications due to its small footprint, high sensitivity, low detection limit, and electromagnetic immunity. Optomechanical sensors that detect from mechanical motion at µm scale to molecular vibration at nm scale have found various applications such as force, inertia, acoustic, chemical, and thermal sensing, etc. In this review, we provide an overview of the recent progress of optomechanical sensors. Three development fields of optomechanical sensors are reviewed, which are passive optomechanical sensors, electro-optomechanical sensing platforms, and molecular vibration sensing schemes. The sensor configurations, applications, and integrations are described. In the end, we also provide our perspectives on the future development directions of optomechanical sensors.
format	article
author	Xinmiao Liu Weixin Liu Zhihao Ren Yiming Ma Bowei Dong Guangya Zhou Chengkuo Lee
author_facet	Xinmiao Liu Weixin Liu Zhihao Ren Yiming Ma Bowei Dong Guangya Zhou Chengkuo Lee
author_sort	Xinmiao Liu
title	Progress of optomechanical micro/nano sensors: a review
title_short	Progress of optomechanical micro/nano sensors: a review
title_full	Progress of optomechanical micro/nano sensors: a review
title_fullStr	Progress of optomechanical micro/nano sensors: a review
title_full_unstemmed	Progress of optomechanical micro/nano sensors: a review
title_sort	progress of optomechanical micro/nano sensors: a review
publisher	Taylor & Francis Group
publishDate	2021
url	https://doaj.org/article/e70d65a5d20d4905b42712efb2f7d7be
work_keys_str_mv	AT xinmiaoliu progressofoptomechanicalmicronanosensorsareview AT weixinliu progressofoptomechanicalmicronanosensorsareview AT zhihaoren progressofoptomechanicalmicronanosensorsareview AT yimingma progressofoptomechanicalmicronanosensorsareview AT boweidong progressofoptomechanicalmicronanosensorsareview AT guangyazhou progressofoptomechanicalmicronanosensorsareview AT chengkuolee progressofoptomechanicalmicronanosensorsareview
_version_	1718444806316752896

Progress of optomechanical micro/nano sensors: a review

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