Pixellated Perovskite Photodiode on IGZO Thin Film Transistor Backplane for Low Dose Indirect X-Ray Detection

The integration of perovskite photodetectors with thin-film transistor (TFT) backplane or complementary metal-oxide-semiconductor CMOS circuit is a key step towards prototyping perovskite-based image sensors. Here, we demonstrate a pixel configuration for indirect X-ray detection comprising of IGZO...

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Autores principales: Taoyu Zou, Ben Xiang, Yangbing Xu, Ya Wang, Chuan Liu, Jun Chen, Kai Wang, Qing Dai, Shengdong Zhang, Yong-Young Noh, Hang Zhou
Formato: article
Lenguaje:EN
Publicado: IEEE 2021
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Acceso en línea:https://doaj.org/article/eabf6b8e1d444bff958a619a8682dc4b
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Sumario:The integration of perovskite photodetectors with thin-film transistor (TFT) backplane or complementary metal-oxide-semiconductor CMOS circuit is a key step towards prototyping perovskite-based image sensors. Here, we demonstrate a pixel configuration for indirect X-ray detection comprising of IGZO TFTs and perovskite photodiodes (PDs). The perovskite photodiode is patterned by a two-step deposition method. Our integrated TFT/PD pixel shows a weak light detection capability down to 4 nW cm<sup>&#x2212;2</sup> and a fast-transient response to the pulse light and gate switching. Combining with a CsI scintillator, the integrated pixel achieves a specific X-ray sensitivity of 8.2 <inline-formula> <tex-math notation="LaTeX">$8.2 \times 10^{2} \mu \mathrm{C} \mathrm{mGy}_{\text {air }}^{-1} \mathrm{~cm}^{-3}$ </tex-math></inline-formula>. Theoretically, with a state-of-the-art scintillator, the new pixel can provide a detectable signal for X-ray imaging at a dose rate as low as <inline-formula> <tex-math notation="LaTeX">$10 \mu \mathrm{Gy}_{\text {air }} \mathrm{s}^{-1}$ </tex-math></inline-formula>. This work provides an advanced pixel design for high resolution, high sensitivity, and high frame-rate flat-panel imager.