Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering

Abstract Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorp...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Sung Hyun Kim, Cheol Hwan Kim, Woo Jin Choi, Tae Gon Lee, Seong Keun Cho, Yong Suk Yang, Jae Heung Lee, Sang-Jin Lee
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/ec11dc0a54634317ade380cddcc351b7
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:ec11dc0a54634317ade380cddcc351b7
record_format	dspace
spelling	oai:doaj.org-article:ec11dc0a54634317ade380cddcc351b72021-12-02T15:05:35ZFluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering10.1038/s41598-017-01472-22045-2322https://doaj.org/article/ec11dc0a54634317ade380cddcc351b72017-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-01472-2https://doaj.org/toc/2045-2322Abstract Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorphous phase with a smooth surface and show a high water contact angle, optical transmittance, and surface hardness. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy studies reveal that as the carbon nanotube concentration increased in the composite target, a carbon cross-linked structure was formed, which enhanced the film hardness and the modulus of the fluorocarbon thin film. Large-area fluorocarbon thin films with a substrate width of 700 mm were successfully fabricated by a pilot-scale roll-to-roll sputtering system using a carbon nanotube/polytetrafluoroethylene composite target.Sung Hyun KimCheol Hwan KimWoo Jin ChoiTae Gon LeeSeong Keun ChoYong Suk YangJae Heung LeeSang-Jin LeeNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-10 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Sung Hyun Kim Cheol Hwan Kim Woo Jin Choi Tae Gon Lee Seong Keun Cho Yong Suk Yang Jae Heung Lee Sang-Jin Lee Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
description	Abstract Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorphous phase with a smooth surface and show a high water contact angle, optical transmittance, and surface hardness. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy studies reveal that as the carbon nanotube concentration increased in the composite target, a carbon cross-linked structure was formed, which enhanced the film hardness and the modulus of the fluorocarbon thin film. Large-area fluorocarbon thin films with a substrate width of 700 mm were successfully fabricated by a pilot-scale roll-to-roll sputtering system using a carbon nanotube/polytetrafluoroethylene composite target.
format	article
author	Sung Hyun Kim Cheol Hwan Kim Woo Jin Choi Tae Gon Lee Seong Keun Cho Yong Suk Yang Jae Heung Lee Sang-Jin Lee
author_facet	Sung Hyun Kim Cheol Hwan Kim Woo Jin Choi Tae Gon Lee Seong Keun Cho Yong Suk Yang Jae Heung Lee Sang-Jin Lee
author_sort	Sung Hyun Kim
title	Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
title_short	Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
title_full	Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
title_fullStr	Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
title_full_unstemmed	Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
title_sort	fluorocarbon thin films fabricated using carbon nanotube/polytetrafluoroethylene composite polymer targets via mid-frequency sputtering
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/ec11dc0a54634317ade380cddcc351b7
work_keys_str_mv	AT sunghyunkim fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering AT cheolhwankim fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering AT woojinchoi fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering AT taegonlee fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering AT seongkeuncho fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering AT yongsukyang fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering AT jaeheunglee fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering AT sangjinlee fluorocarbonthinfilmsfabricatedusingcarbonnanotubepolytetrafluoroethylenecompositepolymertargetsviamidfrequencysputtering
_version_	1718388802497544192

Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering

Ejemplares similares