Re-distribution of oxygen at the interface between γ-Al2O3 and TiN

Re-distribution of oxygen at the interface between γ-Al2O3 and TiN

Abstract Interface of TiN electrode with γ-Al2O3 layers was studied using near edge X-ray absorption fine structure, conventional X-ray photoelectron spectroscopy and photoelectron spectroscopy with high energies. Despite the atomic-layer deposited Al2O3 being converted into thermodynamically-stable...

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Autores principales: E. O. Filatova, A. S. Konashuk, S. S. Sakhonenkov, A. A. Sokolov, V. V. Afanas’ev
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
Materias:
Medicine
R
Science
Q
Acceso en línea:https://doaj.org/article/f2532d72df254e3b9b1fa0442fa7826b
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