A highly CMOS compatible hafnia-based ferroelectric diode

A highly CMOS compatible hafnia-based ferroelectric diode

Designing reliable, scalable and high speed computing systems remains a challenge. Here, the authors identify noncentrosymmetric orthorhombic phase in HZO film and demonstrate a CMOS compatible 3D Vertical HZO-based ferroelectric diode array with self-selective property and 20 ns of speed operation....

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Autores principales: Qing Luo, Yan Cheng, Jianguo Yang, Rongrong Cao, Haili Ma, Yang Yang, Rong Huang, Wei Wei, Yonghui Zheng, Tiancheng Gong, Jie Yu, Xiaoxin Xu, Peng Yuan, Xiaoyan Li, Lu Tai, Haoran Yu, Dashan Shang, Qi Liu, Bing Yu, Qiwei Ren, Hangbing Lv, Ming Liu
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2020
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Q
Acceso en línea:https://doaj.org/article/f2f741492abf4ccca22fd4e425a534c9
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spelling oai:doaj.org-article:f2f741492abf4ccca22fd4e425a534c92021-12-02T16:49:45ZA highly CMOS compatible hafnia-based ferroelectric diode10.1038/s41467-020-15159-22041-1723https://doaj.org/article/f2f741492abf4ccca22fd4e425a534c92020-03-01T00:00:00Zhttps://doi.org/10.1038/s41467-020-15159-2https://doaj.org/toc/2041-1723Designing reliable, scalable and high speed computing systems remains a challenge. Here, the authors identify noncentrosymmetric orthorhombic phase in HZO film and demonstrate a CMOS compatible 3D Vertical HZO-based ferroelectric diode array with self-selective property and 20 ns of speed operation.Qing LuoYan ChengJianguo YangRongrong CaoHaili MaYang YangRong HuangWei WeiYonghui ZhengTiancheng GongJie YuXiaoxin XuPeng YuanXiaoyan LiLu TaiHaoran YuDashan ShangQi LiuBing YuQiwei RenHangbing LvMing LiuNature PortfolioarticleScienceQENNature Communications, Vol 11, Iss 1, Pp 1-8 (2020)
institution DOAJ
collection DOAJ
language EN
topic Science
Q
spellingShingle Science
Q
Qing Luo
Yan Cheng
Jianguo Yang
Rongrong Cao
Haili Ma
Yang Yang
Rong Huang
Wei Wei
Yonghui Zheng
Tiancheng Gong
Jie Yu
Xiaoxin Xu
Peng Yuan
Xiaoyan Li
Lu Tai
Haoran Yu
Dashan Shang
Qi Liu
Bing Yu
Qiwei Ren
Hangbing Lv
Ming Liu
A highly CMOS compatible hafnia-based ferroelectric diode
description Designing reliable, scalable and high speed computing systems remains a challenge. Here, the authors identify noncentrosymmetric orthorhombic phase in HZO film and demonstrate a CMOS compatible 3D Vertical HZO-based ferroelectric diode array with self-selective property and 20 ns of speed operation.
format article
author Qing Luo
Yan Cheng
Jianguo Yang
Rongrong Cao
Haili Ma
Yang Yang
Rong Huang
Wei Wei
Yonghui Zheng
Tiancheng Gong
Jie Yu
Xiaoxin Xu
Peng Yuan
Xiaoyan Li
Lu Tai
Haoran Yu
Dashan Shang
Qi Liu
Bing Yu
Qiwei Ren
Hangbing Lv
Ming Liu
author_facet Qing Luo
Yan Cheng
Jianguo Yang
Rongrong Cao
Haili Ma
Yang Yang
Rong Huang
Wei Wei
Yonghui Zheng
Tiancheng Gong
Jie Yu
Xiaoxin Xu
Peng Yuan
Xiaoyan Li
Lu Tai
Haoran Yu
Dashan Shang
Qi Liu
Bing Yu
Qiwei Ren
Hangbing Lv
Ming Liu
author_sort Qing Luo
title A highly CMOS compatible hafnia-based ferroelectric diode
title_short A highly CMOS compatible hafnia-based ferroelectric diode
title_full A highly CMOS compatible hafnia-based ferroelectric diode
title_fullStr A highly CMOS compatible hafnia-based ferroelectric diode
title_full_unstemmed A highly CMOS compatible hafnia-based ferroelectric diode
title_sort highly cmos compatible hafnia-based ferroelectric diode
publisher Nature Portfolio
publishDate 2020
url https://doaj.org/article/f2f741492abf4ccca22fd4e425a534c9
work_keys_str_mv AT qingluo ahighlycmoscompatiblehafniabasedferroelectricdiode
AT yancheng ahighlycmoscompatiblehafniabasedferroelectricdiode
AT jianguoyang ahighlycmoscompatiblehafniabasedferroelectricdiode
AT rongrongcao ahighlycmoscompatiblehafniabasedferroelectricdiode
AT hailima ahighlycmoscompatiblehafniabasedferroelectricdiode
AT yangyang ahighlycmoscompatiblehafniabasedferroelectricdiode
AT ronghuang ahighlycmoscompatiblehafniabasedferroelectricdiode
AT weiwei ahighlycmoscompatiblehafniabasedferroelectricdiode
AT yonghuizheng ahighlycmoscompatiblehafniabasedferroelectricdiode
AT tianchenggong ahighlycmoscompatiblehafniabasedferroelectricdiode
AT jieyu ahighlycmoscompatiblehafniabasedferroelectricdiode
AT xiaoxinxu ahighlycmoscompatiblehafniabasedferroelectricdiode
AT pengyuan ahighlycmoscompatiblehafniabasedferroelectricdiode
AT xiaoyanli ahighlycmoscompatiblehafniabasedferroelectricdiode
AT lutai ahighlycmoscompatiblehafniabasedferroelectricdiode
AT haoranyu ahighlycmoscompatiblehafniabasedferroelectricdiode
AT dashanshang ahighlycmoscompatiblehafniabasedferroelectricdiode
AT qiliu ahighlycmoscompatiblehafniabasedferroelectricdiode
AT bingyu ahighlycmoscompatiblehafniabasedferroelectricdiode
AT qiweiren ahighlycmoscompatiblehafniabasedferroelectricdiode
AT hangbinglv ahighlycmoscompatiblehafniabasedferroelectricdiode
AT mingliu ahighlycmoscompatiblehafniabasedferroelectricdiode
AT qingluo highlycmoscompatiblehafniabasedferroelectricdiode
AT yancheng highlycmoscompatiblehafniabasedferroelectricdiode
AT jianguoyang highlycmoscompatiblehafniabasedferroelectricdiode
AT rongrongcao highlycmoscompatiblehafniabasedferroelectricdiode
AT hailima highlycmoscompatiblehafniabasedferroelectricdiode
AT yangyang highlycmoscompatiblehafniabasedferroelectricdiode
AT ronghuang highlycmoscompatiblehafniabasedferroelectricdiode
AT weiwei highlycmoscompatiblehafniabasedferroelectricdiode
AT yonghuizheng highlycmoscompatiblehafniabasedferroelectricdiode
AT tianchenggong highlycmoscompatiblehafniabasedferroelectricdiode
AT jieyu highlycmoscompatiblehafniabasedferroelectricdiode
AT xiaoxinxu highlycmoscompatiblehafniabasedferroelectricdiode
AT pengyuan highlycmoscompatiblehafniabasedferroelectricdiode
AT xiaoyanli highlycmoscompatiblehafniabasedferroelectricdiode
AT lutai highlycmoscompatiblehafniabasedferroelectricdiode
AT haoranyu highlycmoscompatiblehafniabasedferroelectricdiode
AT dashanshang highlycmoscompatiblehafniabasedferroelectricdiode
AT qiliu highlycmoscompatiblehafniabasedferroelectricdiode
AT bingyu highlycmoscompatiblehafniabasedferroelectricdiode
AT qiweiren highlycmoscompatiblehafniabasedferroelectricdiode
AT hangbinglv highlycmoscompatiblehafniabasedferroelectricdiode
AT mingliu highlycmoscompatiblehafniabasedferroelectricdiode
_version_ 1718383251253362688

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