A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor

Abstract The development of flexible capacitive pressure sensors has wide application prospects in the fields of electronic skin and intelligent wearable electronic devices, but it is still a great challenge to fabricate capacitive sensors with high sensitivity. Few reports have considered the use o...

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Autores principales: Ruzhan Qin, Mingjun Hu, Xin Li, Te Liang, Haoyi Tan, Jinzhang Liu, Guangcun Shan
Formato: article
Lenguaje:EN
Publicado: Nature Publishing Group 2021
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Acceso en línea:https://doaj.org/article/f31b4ffc3e8f469898335dc1b187b728
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spelling oai:doaj.org-article:f31b4ffc3e8f469898335dc1b187b7282021-12-05T12:06:59ZA new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor10.1038/s41378-021-00327-12055-7434https://doaj.org/article/f31b4ffc3e8f469898335dc1b187b7282021-11-01T00:00:00Zhttps://doi.org/10.1038/s41378-021-00327-1https://doaj.org/toc/2055-7434Abstract The development of flexible capacitive pressure sensors has wide application prospects in the fields of electronic skin and intelligent wearable electronic devices, but it is still a great challenge to fabricate capacitive sensors with high sensitivity. Few reports have considered the use of interdigital electrode structures to improve the sensitivity of capacitive pressure sensors. In this work, a new strategy for the fabrication of a high-performance capacitive flexible pressure sensor based on MXene/polyvinylpyrrolidone (PVP) by an interdigital electrode is reported. By increasing the number of interdigital electrodes and selecting the appropriate dielectric layer, the sensitivity of the capacitive sensor can be improved. The capacitive sensor based on MXene/PVP here has a high sensitivity (~1.25 kPa−1), low detection limit (~0.6 Pa), wide sensing range (up to 294 kPa), fast response and recovery times (~30/15 ms) and mechanical stability of 10000 cycles. The presented sensor here can be used for various pressure detection applications, such as finger pressing, wrist pulse measuring, breathing, swallowing and speech recognition. This work provides a new method of using interdigital electrodes to fabricate a highly sensitive capacitive sensor with very promising application prospects in flexible sensors and wearable electronics.Ruzhan QinMingjun HuXin LiTe LiangHaoyi TanJinzhang LiuGuangcun ShanNature Publishing GrouparticleTechnologyTEngineering (General). Civil engineering (General)TA1-2040ENMicrosystems & Nanoengineering, Vol 7, Iss 1, Pp 1-12 (2021)
institution DOAJ
collection DOAJ
language EN
topic Technology
T
Engineering (General). Civil engineering (General)
TA1-2040
spellingShingle Technology
T
Engineering (General). Civil engineering (General)
TA1-2040
Ruzhan Qin
Mingjun Hu
Xin Li
Te Liang
Haoyi Tan
Jinzhang Liu
Guangcun Shan
A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor
description Abstract The development of flexible capacitive pressure sensors has wide application prospects in the fields of electronic skin and intelligent wearable electronic devices, but it is still a great challenge to fabricate capacitive sensors with high sensitivity. Few reports have considered the use of interdigital electrode structures to improve the sensitivity of capacitive pressure sensors. In this work, a new strategy for the fabrication of a high-performance capacitive flexible pressure sensor based on MXene/polyvinylpyrrolidone (PVP) by an interdigital electrode is reported. By increasing the number of interdigital electrodes and selecting the appropriate dielectric layer, the sensitivity of the capacitive sensor can be improved. The capacitive sensor based on MXene/PVP here has a high sensitivity (~1.25 kPa−1), low detection limit (~0.6 Pa), wide sensing range (up to 294 kPa), fast response and recovery times (~30/15 ms) and mechanical stability of 10000 cycles. The presented sensor here can be used for various pressure detection applications, such as finger pressing, wrist pulse measuring, breathing, swallowing and speech recognition. This work provides a new method of using interdigital electrodes to fabricate a highly sensitive capacitive sensor with very promising application prospects in flexible sensors and wearable electronics.
format article
author Ruzhan Qin
Mingjun Hu
Xin Li
Te Liang
Haoyi Tan
Jinzhang Liu
Guangcun Shan
author_facet Ruzhan Qin
Mingjun Hu
Xin Li
Te Liang
Haoyi Tan
Jinzhang Liu
Guangcun Shan
author_sort Ruzhan Qin
title A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor
title_short A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor
title_full A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor
title_fullStr A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor
title_full_unstemmed A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor
title_sort new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor
publisher Nature Publishing Group
publishDate 2021
url https://doaj.org/article/f31b4ffc3e8f469898335dc1b187b728
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