Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes

Abstract A new method has been established and employed to create a random nanophotonic crystal (NPhC) structure without photolithography on the unpolished side of a single-side-polished sapphire substrate. This nano structure has potential use in enhancing the light-extraction efficiency (LEE) of d...

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Auteurs principaux:	Tinh Binh Tran, Feras AlQatari, Quang-Ho Luc
Format:	article
Langue:	EN
Publié:	Nature Portfolio 2021
Sujets:	Medicine R Science Q
Accès en ligne:	https://doaj.org/article/f48188cdb53f408098b75e890fe3a4f8
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spelling	oai:doaj.org-article:f48188cdb53f408098b75e890fe3a4f82021-12-02T11:37:18ZNanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes10.1038/s41598-021-84426-z2045-2322https://doaj.org/article/f48188cdb53f408098b75e890fe3a4f82021-03-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-84426-zhttps://doaj.org/toc/2045-2322Abstract A new method has been established and employed to create a random nanophotonic crystal (NPhC) structure without photolithography on the unpolished side of a single-side-polished sapphire substrate. This nano structure has potential use in enhancing the light-extraction efficiency (LEE) of deep ultraviolet light-emitting diodes (DUV-LEDs), and has never been built for DUV-LED applications before. Two mask layers in the nano scale (Au and SiO2) were used to create the NPhC and observed using scanning electron microscopy to have an average height of 400 nm and various sizes from 10 to 200 nm. Finally, a conventional DUV-LED and a DUV-LED device with NPhC were simulated using 2D Lumerical Finite-Difference Time-Domain (FDTD) for comparison. The results show that the LEE of the DUV-LED device with this NPhC integrated was significantly directly enhanced by up to 46% and 90% for TE and TM modes, respectively, compared to the conventional DUV-LED device. Thus, this NPhC is believed to be a new, key technique to enhance the LEE of DUV-LEDs.Tinh Binh TranFeras AlQatariQuang-Ho LucNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-7 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Tinh Binh Tran Feras AlQatari Quang-Ho Luc Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes
description	Abstract A new method has been established and employed to create a random nanophotonic crystal (NPhC) structure without photolithography on the unpolished side of a single-side-polished sapphire substrate. This nano structure has potential use in enhancing the light-extraction efficiency (LEE) of deep ultraviolet light-emitting diodes (DUV-LEDs), and has never been built for DUV-LED applications before. Two mask layers in the nano scale (Au and SiO2) were used to create the NPhC and observed using scanning electron microscopy to have an average height of 400 nm and various sizes from 10 to 200 nm. Finally, a conventional DUV-LED and a DUV-LED device with NPhC were simulated using 2D Lumerical Finite-Difference Time-Domain (FDTD) for comparison. The results show that the LEE of the DUV-LED device with this NPhC integrated was significantly directly enhanced by up to 46% and 90% for TE and TM modes, respectively, compared to the conventional DUV-LED device. Thus, this NPhC is believed to be a new, key technique to enhance the LEE of DUV-LEDs.
format	article
author	Tinh Binh Tran Feras AlQatari Quang-Ho Luc
author_facet	Tinh Binh Tran Feras AlQatari Quang-Ho Luc
author_sort	Tinh Binh Tran
title	Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes
title_short	Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes
title_full	Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes
title_fullStr	Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes
title_full_unstemmed	Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes
title_sort	nanophotonic crystals on unpolished sapphire substrates for deep-uv light-emitting diodes
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/f48188cdb53f408098b75e890fe3a4f8
work_keys_str_mv	AT tinhbinhtran nanophotoniccrystalsonunpolishedsapphiresubstratesfordeepuvlightemittingdiodes AT ferasalqatari nanophotoniccrystalsonunpolishedsapphiresubstratesfordeepuvlightemittingdiodes AT quangholuc nanophotoniccrystalsonunpolishedsapphiresubstratesfordeepuvlightemittingdiodes
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Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes

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