Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates

Renewed interest has been witnessed in utilizing the piezoelectric response of PbZr0.52Ti0.48O3 (PZT) films on glass substrates for applications such as adaptive optics. Accordingly, new methodologies are being explored to grow well-oriented PZT thin films to harvest a large piezoelectric response....

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Autores principales:	Anuj Chopra, Muharrem Bayraktar, Maarten Nijland, Johan E. ten Elshof, Fred Bijkerk, Guus Rijnders
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/f56610bbb9ae4ff287aaabaab9e04126
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spelling	oai:doaj.org-article:f56610bbb9ae4ff287aaabaab9e041262021-12-02T12:30:52ZTuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates10.1038/s41598-017-00333-22045-2322https://doaj.org/article/f56610bbb9ae4ff287aaabaab9e041262017-03-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-00333-2https://doaj.org/toc/2045-2322Renewed interest has been witnessed in utilizing the piezoelectric response of PbZr0.52Ti0.48O3 (PZT) films on glass substrates for applications such as adaptive optics. Accordingly, new methodologies are being explored to grow well-oriented PZT thin films to harvest a large piezoelectric response. However, thin film piezoelectric response is significantly reduced compared to intrinsic response due to substrate induced clamping, even when films are well-oriented. Here, a novel method is presented to grow preferentially (100)-oriented PZT films on glass substrates by utilizing crystalline nanosheets as seed layers. Furthermore, increasing the repetition frequency up to 20 Hz during pulsed laser deposition helps to tune the film microstructure to hierarchically ordered columns that leads to reduced clamping and enhanced piezoelectric response evidenced by transmission electron microscopy and analytical calculations. A large piezoelectric coefficient of 250 pm/V is observed in optimally tuned structure which is more than two times the highest reported piezoelectric response on glass. To confirm that the clamping compromises the piezoelectric response, denser films are deposited using a lower repetition frequency and a BiFeO3 buffer layer resulting in significantly reduced piezoelectric responses. This paper demonstrates a novel method for PZT integration on glass substrates without compromising the large piezoelectric response.Anuj ChopraMuharrem BayraktarMaarten NijlandJohan E. ten ElshofFred BijkerkGuus RijndersNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-9 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Anuj Chopra Muharrem Bayraktar Maarten Nijland Johan E. ten Elshof Fred Bijkerk Guus Rijnders Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
description	Renewed interest has been witnessed in utilizing the piezoelectric response of PbZr0.52Ti0.48O3 (PZT) films on glass substrates for applications such as adaptive optics. Accordingly, new methodologies are being explored to grow well-oriented PZT thin films to harvest a large piezoelectric response. However, thin film piezoelectric response is significantly reduced compared to intrinsic response due to substrate induced clamping, even when films are well-oriented. Here, a novel method is presented to grow preferentially (100)-oriented PZT films on glass substrates by utilizing crystalline nanosheets as seed layers. Furthermore, increasing the repetition frequency up to 20 Hz during pulsed laser deposition helps to tune the film microstructure to hierarchically ordered columns that leads to reduced clamping and enhanced piezoelectric response evidenced by transmission electron microscopy and analytical calculations. A large piezoelectric coefficient of 250 pm/V is observed in optimally tuned structure which is more than two times the highest reported piezoelectric response on glass. To confirm that the clamping compromises the piezoelectric response, denser films are deposited using a lower repetition frequency and a BiFeO3 buffer layer resulting in significantly reduced piezoelectric responses. This paper demonstrates a novel method for PZT integration on glass substrates without compromising the large piezoelectric response.
format	article
author	Anuj Chopra Muharrem Bayraktar Maarten Nijland Johan E. ten Elshof Fred Bijkerk Guus Rijnders
author_facet	Anuj Chopra Muharrem Bayraktar Maarten Nijland Johan E. ten Elshof Fred Bijkerk Guus Rijnders
author_sort	Anuj Chopra
title	Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
title_short	Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
title_full	Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
title_fullStr	Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
title_full_unstemmed	Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
title_sort	tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/f56610bbb9ae4ff287aaabaab9e04126
work_keys_str_mv	AT anujchopra tuningoflargepiezoelectricresponseinnanosheetbufferedleadzirconatetitanatefilmsonglasssubstrates AT muharrembayraktar tuningoflargepiezoelectricresponseinnanosheetbufferedleadzirconatetitanatefilmsonglasssubstrates AT maartennijland tuningoflargepiezoelectricresponseinnanosheetbufferedleadzirconatetitanatefilmsonglasssubstrates AT johanetenelshof tuningoflargepiezoelectricresponseinnanosheetbufferedleadzirconatetitanatefilmsonglasssubstrates AT fredbijkerk tuningoflargepiezoelectricresponseinnanosheetbufferedleadzirconatetitanatefilmsonglasssubstrates AT guusrijnders tuningoflargepiezoelectricresponseinnanosheetbufferedleadzirconatetitanatefilmsonglasssubstrates
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Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates

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