Selective etching of 10 MHz repetition rate fs-laser inscribed tracks in YAG
We investigated fs-laser structuring of YAG crystals at high writing velocities up to 100 mm/s using a commercial 10 MHz fs-laser system supplied by Coherent Inc. and selective etching of these structures for fabrication of ultrahigh aspect ratio microchannels. Usage of a diluted acid mixture of 22%...
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Autores principales: | Hasse Kore, Kip Detlef, Kränkel Christian |
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Formato: | article |
Lenguaje: | EN |
Publicado: |
EDP Sciences
2021
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Materias: | |
Acceso en línea: | https://doaj.org/article/f67cc3a1209e49ce9e2888c6581c73a5 |
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