Selective etching of 10 MHz repetition rate fs-laser inscribed tracks in YAG
We investigated fs-laser structuring of YAG crystals at high writing velocities up to 100 mm/s using a commercial 10 MHz fs-laser system supplied by Coherent Inc. and selective etching of these structures for fabrication of ultrahigh aspect ratio microchannels. Usage of a diluted acid mixture of 22%...
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| Auteurs principaux: | , , |
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| Format: | article |
| Langue: | EN |
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EDP Sciences
2021
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| Accès en ligne: | https://doaj.org/article/f67cc3a1209e49ce9e2888c6581c73a5 |
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