Selective etching of 10 MHz repetition rate fs-laser inscribed tracks in YAG
We investigated fs-laser structuring of YAG crystals at high writing velocities up to 100 mm/s using a commercial 10 MHz fs-laser system supplied by Coherent Inc. and selective etching of these structures for fabrication of ultrahigh aspect ratio microchannels. Usage of a diluted acid mixture of 22%...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
EDP Sciences
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/f67cc3a1209e49ce9e2888c6581c73a5 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!