Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass

Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass

Growth of large-area monolayer transition metal dichalcogenides is critical for their application but remains challenging. Here Yang et al. report rapid chemical vapor deposition of 6-inch monolayer molybdenum disulfide by sufficiently uniformly supplying the precursors and catalysts.

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Bibliographic Details
Main Authors: Pengfei Yang, Xiaolong Zou, Zhepeng Zhang, Min Hong, Jianping Shi, Shulin Chen, Jiapei Shu, Liyun Zhao, Shaolong Jiang, Xiebo Zhou, Yahuan Huan, Chunyu Xie, Peng Gao, Qing Chen, Qing Zhang, Zhongfan Liu, Yanfeng Zhang
Format: article
Language:EN
Published: Nature Portfolio 2018
Subjects:
Science
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Online Access:https://doaj.org/article/fc5b3d8c6fce4edcbf61eb2e282e5bf3
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Summary:Growth of large-area monolayer transition metal dichalcogenides is critical for their application but remains challenging. Here Yang et al. report rapid chemical vapor deposition of 6-inch monolayer molybdenum disulfide by sufficiently uniformly supplying the precursors and catalysts.

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