Reliability of MEMS in Shock Environments: 2000–2020

The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the r...

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Autores principales:	Tianfang Peng, Zheng You
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	MEMS shock reliability microstructure mechanics Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/fd745d0249e94680b59f31facc37e8f1
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id	oai:doaj.org-article:fd745d0249e94680b59f31facc37e8f1
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spelling	oai:doaj.org-article:fd745d0249e94680b59f31facc37e8f12021-11-25T18:22:42ZReliability of MEMS in Shock Environments: 2000–202010.3390/mi121112752072-666Xhttps://doaj.org/article/fd745d0249e94680b59f31facc37e8f12021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1275https://doaj.org/toc/2072-666XThe reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research.Tianfang PengZheng YouMDPI AGarticleMEMSshockreliabilitymicrostructure mechanicsMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1275, p 1275 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	MEMS shock reliability microstructure mechanics Mechanical engineering and machinery TJ1-1570
spellingShingle	MEMS shock reliability microstructure mechanics Mechanical engineering and machinery TJ1-1570 Tianfang Peng Zheng You Reliability of MEMS in Shock Environments: 2000–2020
description	The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research.
format	article
author	Tianfang Peng Zheng You
author_facet	Tianfang Peng Zheng You
author_sort	Tianfang Peng
title	Reliability of MEMS in Shock Environments: 2000–2020
title_short	Reliability of MEMS in Shock Environments: 2000–2020
title_full	Reliability of MEMS in Shock Environments: 2000–2020
title_fullStr	Reliability of MEMS in Shock Environments: 2000–2020
title_full_unstemmed	Reliability of MEMS in Shock Environments: 2000–2020
title_sort	reliability of mems in shock environments: 2000–2020
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/fd745d0249e94680b59f31facc37e8f1
work_keys_str_mv	AT tianfangpeng reliabilityofmemsinshockenvironments20002020 AT zhengyou reliabilityofmemsinshockenvironments20002020
_version_	1718411297524023296

Reliability of MEMS in Shock Environments: 2000–2020

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