PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMS

Pd and Pt loaded tin OXide thin films have been successfully prepared by direct UV irradiation of amorphous films of ß-diketonate complexes on Si(100) substrates. Tin OXide films loaded with 10, 30 and 50% Pd and Pt, were characterized by Auger electron spectroscopy (AES). The Auger peak intensity r...

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Autores principales: BUONO-CORE,G.E., CABELLO,G.A., ESPINOZA,H., KLAHN,A.H., TEJOS,M., HILL,R.H.
Lenguaje:English
Publicado: Sociedad Chilena de Química 2006
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Acceso en línea:http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072006000300004
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spelling oai:scielo:S0717-970720060003000042006-11-16PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMSBUONO-CORE,G.E.CABELLO,G.A.ESPINOZA,H.KLAHN,A.H.TEJOS,M.HILL,R.H. Tin OXide Platinum Palladium photodeposition thin films Pd and Pt loaded tin OXide thin films have been successfully prepared by direct UV irradiation of amorphous films of ß-diketonate complexes on Si(100) substrates. Tin OXide films loaded with 10, 30 and 50% Pd and Pt, were characterized by Auger electron spectroscopy (AES). The Auger peak intensity ratios of O KL23L23 to Sn M4N45N45 showed that as-deposited films consist of mixed tin OXide phases whereas annealed films consist mainly of single phase SnO2. The results showed that the stoichiometry of the resulting films is in relative agreement with the composition of the precursor films. The surface characterization of these thin films was performed using Atomic Force Microscopy (AFM). This analysis revealed that loaded tin OXide films have a much rougher surface than unloaded films, with rms roughness values ranging from 28-54 nm for as-deposited Pd-SnO X films to 3.6-20 nm for as-deposited Pt-SnO X films. It was also found that Pt-loaded tin OXide films present a better particle size distribution and uniformity when compared to Pd-loaded tin OXide films. These results demonstrate the potential use of these deposited films in the manufacture of gas-sensing devicesinfo:eu-repo/semantics/openAccessSociedad Chilena de QuímicaJournal of the Chilean Chemical Society v.51 n.3 20062006-09-01text/htmlhttp://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072006000300004en10.4067/S0717-97072006000300004
institution Scielo Chile
collection Scielo Chile
language English
topic Tin OXide
Platinum
Palladium
photodeposition
thin films
spellingShingle Tin OXide
Platinum
Palladium
photodeposition
thin films
BUONO-CORE,G.E.
CABELLO,G.A.
ESPINOZA,H.
KLAHN,A.H.
TEJOS,M.
HILL,R.H.
PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMS
description Pd and Pt loaded tin OXide thin films have been successfully prepared by direct UV irradiation of amorphous films of ß-diketonate complexes on Si(100) substrates. Tin OXide films loaded with 10, 30 and 50% Pd and Pt, were characterized by Auger electron spectroscopy (AES). The Auger peak intensity ratios of O KL23L23 to Sn M4N45N45 showed that as-deposited films consist of mixed tin OXide phases whereas annealed films consist mainly of single phase SnO2. The results showed that the stoichiometry of the resulting films is in relative agreement with the composition of the precursor films. The surface characterization of these thin films was performed using Atomic Force Microscopy (AFM). This analysis revealed that loaded tin OXide films have a much rougher surface than unloaded films, with rms roughness values ranging from 28-54 nm for as-deposited Pd-SnO X films to 3.6-20 nm for as-deposited Pt-SnO X films. It was also found that Pt-loaded tin OXide films present a better particle size distribution and uniformity when compared to Pd-loaded tin OXide films. These results demonstrate the potential use of these deposited films in the manufacture of gas-sensing devices
author BUONO-CORE,G.E.
CABELLO,G.A.
ESPINOZA,H.
KLAHN,A.H.
TEJOS,M.
HILL,R.H.
author_facet BUONO-CORE,G.E.
CABELLO,G.A.
ESPINOZA,H.
KLAHN,A.H.
TEJOS,M.
HILL,R.H.
author_sort BUONO-CORE,G.E.
title PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMS
title_short PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMS
title_full PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMS
title_fullStr PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMS
title_full_unstemmed PHOTOCHEMICAL DEPOSITION OF Pd-LOADED AND Pt-LOADED TIN OXIDE THIN FILMS
title_sort photochemical deposition of pd-loaded and pt-loaded tin oxide thin films
publisher Sociedad Chilena de Química
publishDate 2006
url http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072006000300004
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AT cabelloga photochemicaldepositionofpdloadedandptloadedtinoxidethinfilms
AT espinozah photochemicaldepositionofpdloadedandptloadedtinoxidethinfilms
AT klahnah photochemicaldepositionofpdloadedandptloadedtinoxidethinfilms
AT tejosm photochemicaldepositionofpdloadedandptloadedtinoxidethinfilms
AT hillrh photochemicaldepositionofpdloadedandptloadedtinoxidethinfilms
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