DISPERSIÓN ASISTIDA POR MAGNETRÓN EN PELÍCULAS DE TiN

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DISPERSIÓN ASISTIDA POR MAGNETRÓN EN PELÍCULAS DE TiN

Por medio de la técnica PVD (Deposición física en fase vapor), de dispersión asistida por un magnetrón, se depositó un recubrimiento de TiN sobre sustratos de acero grado herramienta D2 a partir de un blanco de titanio en una mezcla de gases de Ar y N2. Los recubrimientos fueron depositados a temper...

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Detalles Bibliográficos
Autores principales:	Ortega de la Rosa,Rubin, Franco M.,Claudia, Valdés C.,Eduardo, de Anda Rodríguez,Guillermo
Lenguaje:	Spanish / Castilian
Publicado:	Universidad de Tarapacá. Facultad de Ingeniería 2005
Materias:	PVD magnetrón TiN sustratos SEM
Acceso en línea:	http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0718-13372005000200004
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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