Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering
Bismuth thin films were grown onto glass substrates through the DC magnetron sputtering technique. The effects of substrate temperature on the microstructure of the films were evaluated. The structural behavior was analyzed via X-ray diffraction, and it showed a marked influence of the substrate tem...
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Universidad de Tarapacá.
2015
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oai:scielo:S0718-330520150001000112015-01-05Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputteringBedoya-Hincapié,Claudia Milenade la Roche,JhonattanRestrepo-Parra,ElisabethAlfonso,José EdgarOlaya-Florez,Jhon Jairo Bismuth thin film thermal effects sputtering microstructure Bismuth thin films were grown onto glass substrates through the DC magnetron sputtering technique. The effects of substrate temperature on the microstructure of the films were evaluated. The structural behavior was analyzed via X-ray diffraction, and it showed a marked influence of the substrate temperature on the crystallite size and the micro-stress. The morphologies evaluated through Electron Probe Micro-analyzer images indicated a slight difference in the grain size with an increase in temperature as well as a significant increase in surface roughness, according to profilometer measurements.info:eu-repo/semantics/openAccessUniversidad de Tarapacá.Ingeniare. Revista chilena de ingeniería v.23 n.1 20152015-01-01text/htmlhttp://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0718-33052015000100011en10.4067/S0718-33052015000100011 |
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Scielo Chile |
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Scielo Chile |
language |
English |
topic |
Bismuth thin film thermal effects sputtering microstructure |
spellingShingle |
Bismuth thin film thermal effects sputtering microstructure Bedoya-Hincapié,Claudia Milena de la Roche,Jhonattan Restrepo-Parra,Elisabeth Alfonso,José Edgar Olaya-Florez,Jhon Jairo Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering |
description |
Bismuth thin films were grown onto glass substrates through the DC magnetron sputtering technique. The effects of substrate temperature on the microstructure of the films were evaluated. The structural behavior was analyzed via X-ray diffraction, and it showed a marked influence of the substrate temperature on the crystallite size and the micro-stress. The morphologies evaluated through Electron Probe Micro-analyzer images indicated a slight difference in the grain size with an increase in temperature as well as a significant increase in surface roughness, according to profilometer measurements. |
author |
Bedoya-Hincapié,Claudia Milena de la Roche,Jhonattan Restrepo-Parra,Elisabeth Alfonso,José Edgar Olaya-Florez,Jhon Jairo |
author_facet |
Bedoya-Hincapié,Claudia Milena de la Roche,Jhonattan Restrepo-Parra,Elisabeth Alfonso,José Edgar Olaya-Florez,Jhon Jairo |
author_sort |
Bedoya-Hincapié,Claudia Milena |
title |
Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering |
title_short |
Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering |
title_full |
Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering |
title_fullStr |
Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering |
title_full_unstemmed |
Structural and morphological behavior of bismuth thin films grown through DC-magnetron sputtering |
title_sort |
structural and morphological behavior of bismuth thin films grown through dc-magnetron sputtering |
publisher |
Universidad de Tarapacá. |
publishDate |
2015 |
url |
http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0718-33052015000100011 |
work_keys_str_mv |
AT bedoyahincapieclaudiamilena structuralandmorphologicalbehaviorofbismuththinfilmsgrownthroughdcmagnetronsputtering AT delarochejhonattan structuralandmorphologicalbehaviorofbismuththinfilmsgrownthroughdcmagnetronsputtering AT restrepoparraelisabeth structuralandmorphologicalbehaviorofbismuththinfilmsgrownthroughdcmagnetronsputtering AT alfonsojoseedgar structuralandmorphologicalbehaviorofbismuththinfilmsgrownthroughdcmagnetronsputtering AT olayaflorezjhonjairo structuralandmorphologicalbehaviorofbismuththinfilmsgrownthroughdcmagnetronsputtering |
_version_ |
1714203420101967872 |