Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

by Vladyslav Vakarin, Daniele Melati, Thi Thuy Duong Dinh, Xavier Le Roux, Warren Kut King Kan, Cécilia Dupré, Bertrand Szelag, Stéphane Monfray, Frédéric Boeuf, Pavel Cheben, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Carlos Alberto Alonso-Ramos
Published 2021