Superjunction Power Transistors With Interface Charges: A Case Study for GaN

Recent progress in p-GaN trench-filling epitaxy has shown promise for the demonstration of GaN superjunction (SJ) devices. However, the presence of n-type interface charges at the regrowth interfaces has been widely observed. These interface charges pose great challenges to the design and performanc...

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Bibliographic Details
Main Authors: Yunwei Ma, Ming Xiao, Ruizhe Zhang, Han Wang, Yuhao Zhang
Format: article
Language:EN
Published: IEEE 2020
Subjects:
Online Access:https://doaj.org/article/00582700c8e245ffabfc1b5cce9d4da1
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