Time-of-flight secondary ion mass spectrometry fragment regularity in gallium-doped zinc oxide thin films

Abstract Time-of-flight secondary ion mass spectrometry fragment analysis remains a challenging task. The fragment appearance regularity (FAR) rule is particularly useful for two-element compounds such as ZnO. Ion fragments appearing in the form of Zn x O y obey the rule $$2x \ge 2y + 1$$ 2 x ≥ 2 y...

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Autores principales: K. G. Saw, S. R. Esa
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/026519b2eb044c288c5eb4f709df11ee
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