Time-of-flight secondary ion mass spectrometry fragment regularity in gallium-doped zinc oxide thin films
Abstract Time-of-flight secondary ion mass spectrometry fragment analysis remains a challenging task. The fragment appearance regularity (FAR) rule is particularly useful for two-element compounds such as ZnO. Ion fragments appearing in the form of Zn x O y obey the rule $$2x \ge 2y + 1$$ 2 x ≥ 2 y...
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Autores principales: | K. G. Saw, S. R. Esa |
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Formato: | article |
Lenguaje: | EN |
Publicado: |
Nature Portfolio
2021
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Materias: | |
Acceso en línea: | https://doaj.org/article/026519b2eb044c288c5eb4f709df11ee |
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