An Optimum Structure of Scalable Capacitors in 3D Crosspoint Memory Technology

Memory chips need large capacitors in their periphery to drive boosted word-lines and bit-lines for read and write operations. In a previous work, scalable capacitors were proposed for 3D crosspoint memory to keep the area for the capacitors constant over technology generations. This paper proposes...

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Bibliographic Details
Main Authors: Yuya Tone, Toru Tanzawa
Format: article
Language:EN
Published: MDPI AG 2021
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Online Access:https://doaj.org/article/02703bbdf90f439dbcc60f6f02f5ba32
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