Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity
Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements....
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| Autores principales: | , , , , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
MDPI AG
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/0853d5e57b754cf084ecfebd3237c021 |
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