Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements....

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Qi Ding, Hongliang Wang, Hanqiang Zhang, Xiao Huang, Xiaolei Sun, Zhenjie Qin, Rui Ren, Jiajun Zhu, Changde He, Wendong Zhang
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	capacitive micromachined ultrasonic transducer (CMUT) frustum cone-like cavity slotted membrane pressure sensitivity Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/0853d5e57b754cf084ecfebd3237c021
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:0853d5e57b754cf084ecfebd3237c021
record_format	dspace
spelling	oai:doaj.org-article:0853d5e57b754cf084ecfebd3237c0212021-11-25T18:23:15ZResearch on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity10.3390/mi121113402072-666Xhttps://doaj.org/article/0853d5e57b754cf084ecfebd3237c0212021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1340https://doaj.org/toc/2072-666XCapacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements. In this paper, two novel CMUTs are proposed for the first time to improve the measuring performance of micro-pressure in the range of 0–10 kPa. The core concept of the enhancement is strengthening membrane deformability by partly adjusting the CMUT framework under the combined action of electrostatic force and uniform pressure. Two modified structures of an inverted frustum cone-like cavity and slotted membrane are presented, respectively, and a finite element model (FEM) of CMUT was constructed and analyzed using COMSOL Multiphysics 5.5. The results demonstrate that the maximum displacement and pressure sensitivity are improved by 16.01% and 30.79% for the frustum cone-like cavity and 104.22% and 1861.31% for the slotted membrane, respectively. Furthermore, the results show that the width uniformity of the grooves does not influence the characteristics of the membrane, which mainly depend on the total width of the grooves, greatly enriching design flexibility. In brief, the proposed structural designs can significantly improve the micro-pressure measurement performance of the CMUT, which will accelerate the rapid breakthrough of technical barriers in the fields of aerospace, industry control, and other sensing domains.Qi DingHongliang WangHanqiang ZhangXiao HuangXiaolei SunZhenjie QinRui RenJiajun ZhuChangde HeWendong ZhangMDPI AGarticlecapacitive micromachined ultrasonic transducer (CMUT)frustum cone-like cavityslotted membranepressure sensitivityMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1340, p 1340 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	capacitive micromachined ultrasonic transducer (CMUT) frustum cone-like cavity slotted membrane pressure sensitivity Mechanical engineering and machinery TJ1-1570
spellingShingle	capacitive micromachined ultrasonic transducer (CMUT) frustum cone-like cavity slotted membrane pressure sensitivity Mechanical engineering and machinery TJ1-1570 Qi Ding Hongliang Wang Hanqiang Zhang Xiao Huang Xiaolei Sun Zhenjie Qin Rui Ren Jiajun Zhu Changde He Wendong Zhang Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity
description	Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements. In this paper, two novel CMUTs are proposed for the first time to improve the measuring performance of micro-pressure in the range of 0–10 kPa. The core concept of the enhancement is strengthening membrane deformability by partly adjusting the CMUT framework under the combined action of electrostatic force and uniform pressure. Two modified structures of an inverted frustum cone-like cavity and slotted membrane are presented, respectively, and a finite element model (FEM) of CMUT was constructed and analyzed using COMSOL Multiphysics 5.5. The results demonstrate that the maximum displacement and pressure sensitivity are improved by 16.01% and 30.79% for the frustum cone-like cavity and 104.22% and 1861.31% for the slotted membrane, respectively. Furthermore, the results show that the width uniformity of the grooves does not influence the characteristics of the membrane, which mainly depend on the total width of the grooves, greatly enriching design flexibility. In brief, the proposed structural designs can significantly improve the micro-pressure measurement performance of the CMUT, which will accelerate the rapid breakthrough of technical barriers in the fields of aerospace, industry control, and other sensing domains.
format	article
author	Qi Ding Hongliang Wang Hanqiang Zhang Xiao Huang Xiaolei Sun Zhenjie Qin Rui Ren Jiajun Zhu Changde He Wendong Zhang
author_facet	Qi Ding Hongliang Wang Hanqiang Zhang Xiao Huang Xiaolei Sun Zhenjie Qin Rui Ren Jiajun Zhu Changde He Wendong Zhang
author_sort	Qi Ding
title	Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity
title_short	Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity
title_full	Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity
title_fullStr	Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity
title_full_unstemmed	Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity
title_sort	research on novel cmuts for detecting micro-pressure with ultra-high sensitivity and linearity
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/0853d5e57b754cf084ecfebd3237c021
work_keys_str_mv	AT qiding researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT hongliangwang researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT hanqiangzhang researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT xiaohuang researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT xiaoleisun researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT zhenjieqin researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT ruiren researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT jiajunzhu researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT changdehe researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity AT wendongzhang researchonnovelcmutsfordetectingmicropressurewithultrahighsensitivityandlinearity
_version_	1718411239522041856

Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

Ejemplares similares