Sequential and Comprehensive Algorithm for Fault Detection in Semiconductor Sensors

The semiconductor manufacturing processes have been evolved to improve the yield rate. Here, we studied a sequential and comprehensive algorithm that could be used for fault detection and classification (FDC) of the semiconductor chips. A statistical process control (SPC) method is employed for insp...

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Autores principales: Hirak Mazumdar, Tae Hyeon Kim, Jong Min Lee, Euiseok Kum, Seungho Lee, Suho Jeong, Bong Geun Chung
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/0a4ed4f981044769bafd66ffef6a9a1d
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