Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

An amendment to this paper has been published and can be accessed via a link at the top of the paper.

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Autores principales: Ufuk Kilic, Alyssa Mock, Derek Sekora, Simeon Gilbert, Shah Valloppilly, Giselle Melendez, Natale Ianno, Marjorie Langell, Eva Schubert, Mathias Schubert
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
Materias:
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R
Science
Q
Acceso en línea:https://doaj.org/article/124a3a233cfa45ff93d3b697ce5ecb64
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spelling oai:doaj.org-article:124a3a233cfa45ff93d3b697ce5ecb642021-12-02T17:04:36ZAuthor Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry10.1038/s41598-021-86624-12045-2322https://doaj.org/article/124a3a233cfa45ff93d3b697ce5ecb642021-03-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-86624-1https://doaj.org/toc/2045-2322An amendment to this paper has been published and can be accessed via a link at the top of the paper.Ufuk KilicAlyssa MockDerek SekoraSimeon GilbertShah ValloppillyGiselle MelendezNatale IannoMarjorie LangellEva SchubertMathias SchubertNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-1 (2021)
institution DOAJ
collection DOAJ
language EN
topic Medicine
R
Science
Q
spellingShingle Medicine
R
Science
Q
Ufuk Kilic
Alyssa Mock
Derek Sekora
Simeon Gilbert
Shah Valloppilly
Giselle Melendez
Natale Ianno
Marjorie Langell
Eva Schubert
Mathias Schubert
Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
description An amendment to this paper has been published and can be accessed via a link at the top of the paper.
format article
author Ufuk Kilic
Alyssa Mock
Derek Sekora
Simeon Gilbert
Shah Valloppilly
Giselle Melendez
Natale Ianno
Marjorie Langell
Eva Schubert
Mathias Schubert
author_facet Ufuk Kilic
Alyssa Mock
Derek Sekora
Simeon Gilbert
Shah Valloppilly
Giselle Melendez
Natale Ianno
Marjorie Langell
Eva Schubert
Mathias Schubert
author_sort Ufuk Kilic
title Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
title_short Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
title_full Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
title_fullStr Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
title_full_unstemmed Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
title_sort author correction: precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
publisher Nature Portfolio
publishDate 2021
url https://doaj.org/article/124a3a233cfa45ff93d3b697ce5ecb64
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AT nataleianno authorcorrectionprecursorsurfaceinteractionsrevealedduringplasmaenhancedatomiclayerdepositionofmetaloxidethinfilmsbyinsituspectroscopicellipsometry
AT marjorielangell authorcorrectionprecursorsurfaceinteractionsrevealedduringplasmaenhancedatomiclayerdepositionofmetaloxidethinfilmsbyinsituspectroscopicellipsometry
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