Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications

Abstract Motivated by recent finding of crystallographic-orientation-dependent etching behavior of sintered ceramics, the plasma resistance of nanocrystalline Y2O3-MgO composite ceramics (YM) was evaluated for the first time. We report a remarkably high plasma etching resistance of nanostructure YM...

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Autores principales:	Hyeon-Myeong Oh, Young-Jo Park, Ha-Neul Kim, Kundan Kumar, Jae-Woong Ko, Chae-Eon Lee, Hyun-Kwuon Lee
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/163b27abf5284ed09a4ca02243b60294
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id	oai:doaj.org-article:163b27abf5284ed09a4ca02243b60294
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spelling	oai:doaj.org-article:163b27abf5284ed09a4ca02243b602942021-12-02T15:43:17ZRemarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications10.1038/s41598-021-89664-92045-2322https://doaj.org/article/163b27abf5284ed09a4ca02243b602942021-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-89664-9https://doaj.org/toc/2045-2322Abstract Motivated by recent finding of crystallographic-orientation-dependent etching behavior of sintered ceramics, the plasma resistance of nanocrystalline Y2O3-MgO composite ceramics (YM) was evaluated for the first time. We report a remarkably high plasma etching resistance of nanostructure YM surpassing the plasma resistance of commercially used transparent Y2O3 and MgAl2O4 ceramics. The pore-free YM ceramic with grain sizes of several hundred nm was fabricated by hot press sintering, enabling theoretical maximum densification at low temperature. The insoluble two components effectively suppressed the grain growth by mutual pinning. The engineering implication of the developed YM nanocomposite imparts enhanced mechanical reliability, better cost effectiveness with excellent plasma resistance property over their counterparts in plasma using semiconductor applications.Hyeon-Myeong OhYoung-Jo ParkHa-Neul KimKundan KumarJae-Woong KoChae-Eon LeeHyun-Kwuon LeeNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-7 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Hyeon-Myeong Oh Young-Jo Park Ha-Neul Kim Kundan Kumar Jae-Woong Ko Chae-Eon Lee Hyun-Kwuon Lee Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications
description	Abstract Motivated by recent finding of crystallographic-orientation-dependent etching behavior of sintered ceramics, the plasma resistance of nanocrystalline Y2O3-MgO composite ceramics (YM) was evaluated for the first time. We report a remarkably high plasma etching resistance of nanostructure YM surpassing the plasma resistance of commercially used transparent Y2O3 and MgAl2O4 ceramics. The pore-free YM ceramic with grain sizes of several hundred nm was fabricated by hot press sintering, enabling theoretical maximum densification at low temperature. The insoluble two components effectively suppressed the grain growth by mutual pinning. The engineering implication of the developed YM nanocomposite imparts enhanced mechanical reliability, better cost effectiveness with excellent plasma resistance property over their counterparts in plasma using semiconductor applications.
format	article
author	Hyeon-Myeong Oh Young-Jo Park Ha-Neul Kim Kundan Kumar Jae-Woong Ko Chae-Eon Lee Hyun-Kwuon Lee
author_facet	Hyeon-Myeong Oh Young-Jo Park Ha-Neul Kim Kundan Kumar Jae-Woong Ko Chae-Eon Lee Hyun-Kwuon Lee
author_sort	Hyeon-Myeong Oh
title	Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications
title_short	Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications
title_full	Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications
title_fullStr	Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications
title_full_unstemmed	Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications
title_sort	remarkable plasma-resistance performance by nanocrystalline y2o3·mgo composite ceramics for semiconductor industry applications
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/163b27abf5284ed09a4ca02243b60294
work_keys_str_mv	AT hyeonmyeongoh remarkableplasmaresistanceperformancebynanocrystalliney2o3mgocompositeceramicsforsemiconductorindustryapplications AT youngjopark remarkableplasmaresistanceperformancebynanocrystalliney2o3mgocompositeceramicsforsemiconductorindustryapplications AT haneulkim remarkableplasmaresistanceperformancebynanocrystalliney2o3mgocompositeceramicsforsemiconductorindustryapplications AT kundankumar remarkableplasmaresistanceperformancebynanocrystalliney2o3mgocompositeceramicsforsemiconductorindustryapplications AT jaewoongko remarkableplasmaresistanceperformancebynanocrystalliney2o3mgocompositeceramicsforsemiconductorindustryapplications AT chaeeonlee remarkableplasmaresistanceperformancebynanocrystalliney2o3mgocompositeceramicsforsemiconductorindustryapplications AT hyunkwuonlee remarkableplasmaresistanceperformancebynanocrystalliney2o3mgocompositeceramicsforsemiconductorindustryapplications
_version_	1718385794591227904

Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications

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