Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits

Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits

Fabricating defect-free micro- and nano-circuits over large scales with controlled interconnections remains a challenge. Here, Bollani et al. show a dewetting strategy for engineering arrays of parallel Si-based nanowires up to 0.75 mm and complex interconnected circuits of monocrystalline Si on a c...

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Auteurs principaux: Monica Bollani, Marco Salvalaglio, Abdennacer Benali, Mohammed Bouabdellaoui, Meher Naffouti, Mario Lodari, Stefano Di Corato, Alexey Fedorov, Axel Voigt, Ibtissem Fraj, Luc Favre, Jean Benoit Claude, David Grosso, Giuseppe Nicotra, Antonio Mio, Antoine Ronda, Isabelle Berbezier, Marco Abbarchi
Format: article
Langue:EN
Publié: Nature Portfolio 2019
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Science
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Accès en ligne:https://doaj.org/article/21de977ef4894f20829d7bd10b3c7fe3
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Internet

https://doaj.org/article/21de977ef4894f20829d7bd10b3c7fe3

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