Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen...
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Auteurs principaux: | , , , , , , |
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Format: | article |
Langue: | EN |
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MDPI AG
2021
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Accès en ligne: | https://doaj.org/article/264bdf79b04b4cf7b05bf32e0b13eae6 |
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