Adhesion analysis of silane coupling agent/copper interface with density functional theory

Nanotechnology devices with strong adhesion strength are required due to the miniaturization and reduction of the thickness of electronic devices. This paper describes a technique to select a silane coupling agent effective for obtaining the strong adhesion with copper by use of a density functional...

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Auteurs principaux: Mariko MIYAZAKI, Yoshiharu KANEGAE, Tomio IWASAKI
Format: article
Langue:EN
Publié: The Japan Society of Mechanical Engineers 2014
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Accès en ligne:https://doaj.org/article/2b0f50bd98fc4ab2bad06e8cab4c2cd7
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