Modeling of structure of deposit formed by laser-induced deposition of metals from gas phase
The mathematical model that describes adequate the laser-induced process of metal deposition from gas phase on dielectric substrate is suggested. In the result of calculation, the temperature field distribution in deposited materials and deposit profiles for different process stages are obtained...
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| Auteurs principaux: | , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2008
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/2fed444c4db648618021be4ec8b8d449 |
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