Modeling of structure of deposit formed by laser-induced deposition of metals from gas phase

The mathematical model that describes adequate the laser-induced process of metal deposition from gas phase on dielectric substrate is suggested. In the result of calculation, the temperature field distribution in deposited materials and deposit profiles for different process stages are obtained...

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Bibliographic Details
Main Authors: Nedolia, A., Maziar, E., Titov, I.
Format: article
Language:EN
Published: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2008
Subjects:
Online Access:https://doaj.org/article/2fed444c4db648618021be4ec8b8d449
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