Boundary-directed epitaxy of block copolymers

Directing the position, orientation, and long-range lateral order of block copolymer domains to produce technologically-useful, sublithographic patterns is a challenge. Here, the authors present a promising approach to overcome the challenge by directing assembly using spatial boundaries between pla...

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Autores principales: Robert M. Jacobberger, Vikram Thapar, Guang-Peng Wu, Tzu-Hsuan Chang, Vivek Saraswat, Austin J. Way, Katherine R. Jinkins, Zhenqiang Ma, Paul F. Nealey, Su-Mi Hur, Shisheng Xiong, Michael S. Arnold
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2020
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Acceso en línea:https://doaj.org/article/3052fb13b2e2403e9e6b27014a696eab
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