Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass b...

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Autores principales: Frederik Kotz, Patrick Risch, Karl Arnold, Semih Sevim, Josep Puigmartí-Luis, Alexander Quick, Michael Thiel, Andrei Hrynevich, Paul D. Dalton, Dorothea Helmer, Bastian E. Rapp
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2019
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Acceso en línea:https://doaj.org/article/343beb84b8964d7da09413a080dc8aca
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