Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass b...
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| Autores principales: | , , , , , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2019
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/343beb84b8964d7da09413a080dc8aca |
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| Sumario: | Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass by sacrificial template replication. |
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