Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass b...

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Autores principales:	Frederik Kotz, Patrick Risch, Karl Arnold, Semih Sevim, Josep Puigmartí-Luis, Alexander Quick, Michael Thiel, Andrei Hrynevich, Paul D. Dalton, Dorothea Helmer, Bastian E. Rapp
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2019
Materias:	Science Q
Acceso en línea:	https://doaj.org/article/343beb84b8964d7da09413a080dc8aca
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spelling	oai:doaj.org-article:343beb84b8964d7da09413a080dc8aca2021-12-02T17:01:55ZFabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass10.1038/s41467-019-09497-z2041-1723https://doaj.org/article/343beb84b8964d7da09413a080dc8aca2019-03-01T00:00:00Zhttps://doi.org/10.1038/s41467-019-09497-zhttps://doaj.org/toc/2041-1723Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass by sacrificial template replication.Frederik KotzPatrick RischKarl ArnoldSemih SevimJosep Puigmartí-LuisAlexander QuickMichael ThielAndrei HrynevichPaul D. DaltonDorothea HelmerBastian E. RappNature PortfolioarticleScienceQENNature Communications, Vol 10, Iss 1, Pp 1-7 (2019)
institution	DOAJ
collection	DOAJ
language	EN
topic	Science Q
spellingShingle	Science Q Frederik Kotz Patrick Risch Karl Arnold Semih Sevim Josep Puigmartí-Luis Alexander Quick Michael Thiel Andrei Hrynevich Paul D. Dalton Dorothea Helmer Bastian E. Rapp Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
description	Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass by sacrificial template replication.
format	article
author	Frederik Kotz Patrick Risch Karl Arnold Semih Sevim Josep Puigmartí-Luis Alexander Quick Michael Thiel Andrei Hrynevich Paul D. Dalton Dorothea Helmer Bastian E. Rapp
author_facet	Frederik Kotz Patrick Risch Karl Arnold Semih Sevim Josep Puigmartí-Luis Alexander Quick Michael Thiel Andrei Hrynevich Paul D. Dalton Dorothea Helmer Bastian E. Rapp
author_sort	Frederik Kotz
title	Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
title_short	Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
title_full	Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
title_fullStr	Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
title_full_unstemmed	Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
title_sort	fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
publisher	Nature Portfolio
publishDate	2019
url	https://doaj.org/article/343beb84b8964d7da09413a080dc8aca
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Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

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