Optimizing VO2 film properties for use in SAW devices
The aim of this study is to optimize the conditions for producing thin VO2 films for their use in SAW devices. We used the pulsed laser deposition (PLD) method to produce VO2 films. We used a metallic vanadium target. The dependence of the oxygen pressure during PLD on the resistive metal–insulator...
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| Auteurs principaux: | , , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
World Scientific Publishing
2021
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/35a03d06a17144949aa1fe752a05e91a |
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