Optimizing VO2 film properties for use in SAW devices

The aim of this study is to optimize the conditions for producing thin VO2 films for their use in SAW devices. We used the pulsed laser deposition (PLD) method to produce VO2 films. We used a metallic vanadium target. The dependence of the oxygen pressure during PLD on the resistive metal–insulator...

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Autores principales:	M. E. Kutepov, G. Ya. Karapetyan, I. V. Lisnevskaya, K. G. Abdulvakhidov, A. A. Kozmin, E. M. Kaidashev
Formato:	article
Lenguaje:	EN
Publicado:	World Scientific Publishing 2021
Materias:	surface acoustic wave vo2 film laser pulsed deposition parameter s21 metal–insulator transition Electricity QC501-721
Acceso en línea:	https://doaj.org/article/35a03d06a17144949aa1fe752a05e91a
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spelling	oai:doaj.org-article:35a03d06a17144949aa1fe752a05e91a2021-11-11T04:02:22ZOptimizing VO2 film properties for use in SAW devices2010-135X2010-136810.1142/S2010135X21600122https://doaj.org/article/35a03d06a17144949aa1fe752a05e91a2021-10-01T00:00:00Zhttp://www.worldscientific.com/doi/epdf/10.1142/S2010135X21600122https://doaj.org/toc/2010-135Xhttps://doaj.org/toc/2010-1368The aim of this study is to optimize the conditions for producing thin VO2 films for their use in SAW devices. We used the pulsed laser deposition (PLD) method to produce VO2 films. We used a metallic vanadium target. The dependence of the oxygen pressure during PLD on the resistive metal–insulator transition (MIT) on substrates of c-sapphire and LiNbO3 YX/128∘ was studied. The resulting films had sharp metal–insulator temperature transitions on c-Al2O3. The most high-quality films showed resistance change by four orders of magnitude. At the lower point of the hysteresis, the resistance of these samples was in the range of 50–100 Ω. The synthesized VO2 films had a sharp temperature transition and a relatively small width of thermal hysteresis. The SAW damping during its passage through a VO2/ZnO/LiNbO3 YX/128∘ film at the metal–insulator phase transition temperature was studied. Attenuation SAW decreases with increasing temperature from 52 dB/cm to 0 dB/cm.M. E. KutepovG. Ya. KarapetyanI. V. LisnevskayaK. G. AbdulvakhidovA. A. KozminE. M. KaidashevWorld Scientific Publishingarticlesurface acoustic wavevo2 filmlaser pulsed depositionparameter s21metal–insulator transitionElectricityQC501-721ENJournal of Advanced Dielectrics, Vol 11, Iss 5, Pp 2160012-1-2160012-4 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	surface acoustic wave vo2 film laser pulsed deposition parameter s21 metal–insulator transition Electricity QC501-721
spellingShingle	surface acoustic wave vo2 film laser pulsed deposition parameter s21 metal–insulator transition Electricity QC501-721 M. E. Kutepov G. Ya. Karapetyan I. V. Lisnevskaya K. G. Abdulvakhidov A. A. Kozmin E. M. Kaidashev Optimizing VO2 film properties for use in SAW devices
description	The aim of this study is to optimize the conditions for producing thin VO2 films for their use in SAW devices. We used the pulsed laser deposition (PLD) method to produce VO2 films. We used a metallic vanadium target. The dependence of the oxygen pressure during PLD on the resistive metal–insulator transition (MIT) on substrates of c-sapphire and LiNbO3 YX/128∘ was studied. The resulting films had sharp metal–insulator temperature transitions on c-Al2O3. The most high-quality films showed resistance change by four orders of magnitude. At the lower point of the hysteresis, the resistance of these samples was in the range of 50–100 Ω. The synthesized VO2 films had a sharp temperature transition and a relatively small width of thermal hysteresis. The SAW damping during its passage through a VO2/ZnO/LiNbO3 YX/128∘ film at the metal–insulator phase transition temperature was studied. Attenuation SAW decreases with increasing temperature from 52 dB/cm to 0 dB/cm.
format	article
author	M. E. Kutepov G. Ya. Karapetyan I. V. Lisnevskaya K. G. Abdulvakhidov A. A. Kozmin E. M. Kaidashev
author_facet	M. E. Kutepov G. Ya. Karapetyan I. V. Lisnevskaya K. G. Abdulvakhidov A. A. Kozmin E. M. Kaidashev
author_sort	M. E. Kutepov
title	Optimizing VO2 film properties for use in SAW devices
title_short	Optimizing VO2 film properties for use in SAW devices
title_full	Optimizing VO2 film properties for use in SAW devices
title_fullStr	Optimizing VO2 film properties for use in SAW devices
title_full_unstemmed	Optimizing VO2 film properties for use in SAW devices
title_sort	optimizing vo2 film properties for use in saw devices
publisher	World Scientific Publishing
publishDate	2021
url	https://doaj.org/article/35a03d06a17144949aa1fe752a05e91a
work_keys_str_mv	AT mekutepov optimizingvo2filmpropertiesforuseinsawdevices AT gyakarapetyan optimizingvo2filmpropertiesforuseinsawdevices AT ivlisnevskaya optimizingvo2filmpropertiesforuseinsawdevices AT kgabdulvakhidov optimizingvo2filmpropertiesforuseinsawdevices AT aakozmin optimizingvo2filmpropertiesforuseinsawdevices AT emkaidashev optimizingvo2filmpropertiesforuseinsawdevices
_version_	1718439574658613248

Optimizing VO2 film properties for use in SAW devices

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