Optimizing VO2 film properties for use in SAW devices

The aim of this study is to optimize the conditions for producing thin VO2 films for their use in SAW devices. We used the pulsed laser deposition (PLD) method to produce VO2 films. We used a metallic vanadium target. The dependence of the oxygen pressure during PLD on the resistive metal–insulator...

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Autores principales: M. E. Kutepov, G. Ya. Karapetyan, I. V. Lisnevskaya, K. G. Abdulvakhidov, A. A. Kozmin, E. M. Kaidashev
Formato: article
Lenguaje:EN
Publicado: World Scientific Publishing 2021
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Acceso en línea:https://doaj.org/article/35a03d06a17144949aa1fe752a05e91a
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