Laser ablation of silicon with THz bursts of femtosecond pulses

Abstract In this work, we performed an experimental investigation supported by a theoretical analysis, to improve knowledge on the laser ablation of silicon with THz bursts of femtosecond laser pulses. Laser ablated craters have been created using 200 fs pulses at a wavelength of 1030 nm on silicon...

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Autores principales: Caterina Gaudiuso, Pavel N. Terekhin, Annalisa Volpe, Stefan Nolte, Bärbel Rethfeld, Antonio Ancona
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/36584e59f43648beb64ac84bdd124185
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