Particle Surface Modification in the Near-Electrode Region of an RF Discharge

The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chambe...

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Autores principales: Evgenii Aleksandrovich Kononov, Mikhail Mikhailovich Vasiliev, Elena Valeryevna Vasilieva, Oleg Fedorovich Petrov
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/3891107e966e42b2ace875629355ec9b
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