Particle Surface Modification in the Near-Electrode Region of an RF Discharge
The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chambe...
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| Main Authors: | , , , |
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| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/3891107e966e42b2ace875629355ec9b |
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