Particle Surface Modification in the Near-Electrode Region of an RF Discharge

The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chambe...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Evgenii Aleksandrovich Kononov, Mikhail Mikhailovich Vasiliev, Elena Valeryevna Vasilieva, Oleg Fedorovich Petrov
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
Acceso en línea:https://doaj.org/article/3891107e966e42b2ace875629355ec9b
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
Descripción
Sumario:The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chamber after switching the RF discharge on. For melamine-formaldehyde (MF) particles, the appearance of an island metal coating is observed after 30 min of plasma exposure. Eroded electrodes and elements of the gas discharge chamber may serve as a source of deposited material. In addition, an analysis of the surface and composition of particles placed on the upper electrode after 6 h of plasma exposure is presented. We reveal that the composition and structure of the particle coating changes during the experiment. The MF particles under exposure become eroded, and needle-like structures containing metals are formed on their surface. We also observe the formation of columnar structures from the products of erosion of electrodes on particles with a metal coating.