Particle Surface Modification in the Near-Electrode Region of an RF Discharge

The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chambe...

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Autores principales:	Evgenii Aleksandrovich Kononov, Mikhail Mikhailovich Vasiliev, Elena Valeryevna Vasilieva, Oleg Fedorovich Petrov
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	low-temperature plasma surface etching sputtering plasma deposition plasma modification Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/3891107e966e42b2ace875629355ec9b
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spelling	oai:doaj.org-article:3891107e966e42b2ace875629355ec9b2021-11-25T18:30:56ZParticle Surface Modification in the Near-Electrode Region of an RF Discharge10.3390/nano111129312079-4991https://doaj.org/article/3891107e966e42b2ace875629355ec9b2021-11-01T00:00:00Zhttps://www.mdpi.com/2079-4991/11/11/2931https://doaj.org/toc/2079-4991The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chamber after switching the RF discharge on. For melamine-formaldehyde (MF) particles, the appearance of an island metal coating is observed after 30 min of plasma exposure. Eroded electrodes and elements of the gas discharge chamber may serve as a source of deposited material. In addition, an analysis of the surface and composition of particles placed on the upper electrode after 6 h of plasma exposure is presented. We reveal that the composition and structure of the particle coating changes during the experiment. The MF particles under exposure become eroded, and needle-like structures containing metals are formed on their surface. We also observe the formation of columnar structures from the products of erosion of electrodes on particles with a metal coating.Evgenii Aleksandrovich KononovMikhail Mikhailovich VasilievElena Valeryevna VasilievaOleg Fedorovich PetrovMDPI AGarticlelow-temperature plasmasurface etchingsputteringplasma depositionplasma modificationChemistryQD1-999ENNanomaterials, Vol 11, Iss 2931, p 2931 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	low-temperature plasma surface etching sputtering plasma deposition plasma modification Chemistry QD1-999
spellingShingle	low-temperature plasma surface etching sputtering plasma deposition plasma modification Chemistry QD1-999 Evgenii Aleksandrovich Kononov Mikhail Mikhailovich Vasiliev Elena Valeryevna Vasilieva Oleg Fedorovich Petrov Particle Surface Modification in the Near-Electrode Region of an RF Discharge
description	The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chamber after switching the RF discharge on. For melamine-formaldehyde (MF) particles, the appearance of an island metal coating is observed after 30 min of plasma exposure. Eroded electrodes and elements of the gas discharge chamber may serve as a source of deposited material. In addition, an analysis of the surface and composition of particles placed on the upper electrode after 6 h of plasma exposure is presented. We reveal that the composition and structure of the particle coating changes during the experiment. The MF particles under exposure become eroded, and needle-like structures containing metals are formed on their surface. We also observe the formation of columnar structures from the products of erosion of electrodes on particles with a metal coating.
format	article
author	Evgenii Aleksandrovich Kononov Mikhail Mikhailovich Vasiliev Elena Valeryevna Vasilieva Oleg Fedorovich Petrov
author_facet	Evgenii Aleksandrovich Kononov Mikhail Mikhailovich Vasiliev Elena Valeryevna Vasilieva Oleg Fedorovich Petrov
author_sort	Evgenii Aleksandrovich Kononov
title	Particle Surface Modification in the Near-Electrode Region of an RF Discharge
title_short	Particle Surface Modification in the Near-Electrode Region of an RF Discharge
title_full	Particle Surface Modification in the Near-Electrode Region of an RF Discharge
title_fullStr	Particle Surface Modification in the Near-Electrode Region of an RF Discharge
title_full_unstemmed	Particle Surface Modification in the Near-Electrode Region of an RF Discharge
title_sort	particle surface modification in the near-electrode region of an rf discharge
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/3891107e966e42b2ace875629355ec9b
work_keys_str_mv	AT evgeniialeksandrovichkononov particlesurfacemodificationinthenearelectroderegionofanrfdischarge AT mikhailmikhailovichvasiliev particlesurfacemodificationinthenearelectroderegionofanrfdischarge AT elenavaleryevnavasilieva particlesurfacemodificationinthenearelectroderegionofanrfdischarge AT olegfedorovichpetrov particlesurfacemodificationinthenearelectroderegionofanrfdischarge
_version_	1718411008236584960

Particle Surface Modification in the Near-Electrode Region of an RF Discharge

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