Particle Surface Modification in the Near-Electrode Region of an RF Discharge
The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chambe...
Guardado en:
Autores principales: | Evgenii Aleksandrovich Kononov, Mikhail Mikhailovich Vasiliev, Elena Valeryevna Vasilieva, Oleg Fedorovich Petrov |
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Formato: | article |
Lenguaje: | EN |
Publicado: |
MDPI AG
2021
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Materias: | |
Acceso en línea: | https://doaj.org/article/3891107e966e42b2ace875629355ec9b |
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