Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator

In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element...

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Autores principales: Jiangong Cui, Yaxin Yu, Xiaoxia Chu, Rongyu Zhao, Min Zhu, Wendong Zhang, Guojun Zhang
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/38b5cf9723444eb084b2f4927975df02
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