Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator

In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element...

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Autores principales:	Jiangong Cui, Yaxin Yu, Xiaoxia Chu, Rongyu Zhao, Min Zhu, Wendong Zhang, Guojun Zhang
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	grooved waveguide photoacoustic coupling broadband acoustic sensor Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/38b5cf9723444eb084b2f4927975df02
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id	oai:doaj.org-article:38b5cf9723444eb084b2f4927975df02
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spelling	oai:doaj.org-article:38b5cf9723444eb084b2f4927975df022021-11-25T18:23:14ZResearch on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator10.3390/mi121113382072-666Xhttps://doaj.org/article/38b5cf9723444eb084b2f4927975df022021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1338https://doaj.org/toc/2072-666XIn order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element method are used to analyze the optical characteristics of a grooved microring resonator, and the size of the sensor is optimized. The theoretical analysis results show that, when the bending radius reaches 10 μm, the theoretical quality factor is about 10<sup>6</sup>, the sensitivity is 3.14 mV/Pa, and the 3 dB bandwidth is 430 MHz, which is three orders of magnitude larger based on the sensitivity of the silicon-based cascaded resonator acoustic sensor. The sensor exhibits high sensitivity and can be used in hydrophones. The small size of the sensor also shows its potential application in the field of array integration.Jiangong CuiYaxin YuXiaoxia ChuRongyu ZhaoMin ZhuWendong ZhangGuojun ZhangMDPI AGarticlegrooved waveguidephotoacoustic couplingbroadbandacoustic sensorMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1338, p 1338 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	grooved waveguide photoacoustic coupling broadband acoustic sensor Mechanical engineering and machinery TJ1-1570
spellingShingle	grooved waveguide photoacoustic coupling broadband acoustic sensor Mechanical engineering and machinery TJ1-1570 Jiangong Cui Yaxin Yu Xiaoxia Chu Rongyu Zhao Min Zhu Wendong Zhang Guojun Zhang Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
description	In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element method are used to analyze the optical characteristics of a grooved microring resonator, and the size of the sensor is optimized. The theoretical analysis results show that, when the bending radius reaches 10 μm, the theoretical quality factor is about 10<sup>6</sup>, the sensitivity is 3.14 mV/Pa, and the 3 dB bandwidth is 430 MHz, which is three orders of magnitude larger based on the sensitivity of the silicon-based cascaded resonator acoustic sensor. The sensor exhibits high sensitivity and can be used in hydrophones. The small size of the sensor also shows its potential application in the field of array integration.
format	article
author	Jiangong Cui Yaxin Yu Xiaoxia Chu Rongyu Zhao Min Zhu Wendong Zhang Guojun Zhang
author_facet	Jiangong Cui Yaxin Yu Xiaoxia Chu Rongyu Zhao Min Zhu Wendong Zhang Guojun Zhang
author_sort	Jiangong Cui
title	Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
title_short	Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
title_full	Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
title_fullStr	Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
title_full_unstemmed	Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
title_sort	research on characteristics of broadband acoustic sensor based on silicon-based grooved microring resonator
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/38b5cf9723444eb084b2f4927975df02
work_keys_str_mv	AT jiangongcui researchoncharacteristicsofbroadbandacousticsensorbasedonsiliconbasedgroovedmicroringresonator AT yaxinyu researchoncharacteristicsofbroadbandacousticsensorbasedonsiliconbasedgroovedmicroringresonator AT xiaoxiachu researchoncharacteristicsofbroadbandacousticsensorbasedonsiliconbasedgroovedmicroringresonator AT rongyuzhao researchoncharacteristicsofbroadbandacousticsensorbasedonsiliconbasedgroovedmicroringresonator AT minzhu researchoncharacteristicsofbroadbandacousticsensorbasedonsiliconbasedgroovedmicroringresonator AT wendongzhang researchoncharacteristicsofbroadbandacousticsensorbasedonsiliconbasedgroovedmicroringresonator AT guojunzhang researchoncharacteristicsofbroadbandacousticsensorbasedonsiliconbasedgroovedmicroringresonator
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Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator

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