Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator
In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element...
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| Main Authors: | , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/38b5cf9723444eb084b2f4927975df02 |
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