Low-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method

A low-voltage programmable gate-all-around (GAA) nanosheet poly-Si thin-film transistor (TFT) nonvolatile memory (NVM), which uses band-to-band tunneling induced hot electron (BBHE) programming, is demonstrated. The BBHE method is extremely efficient for programming data in the p-type GAA nanosheet...

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Autores principales: Lun-Chun Chen, Hung-Bin Chen, Yu-Shuo Chang, Shih-Han Lin, Ming-Hung Han, Jia-Jiun Wu, Mu-Shih Yeh, Yu-Ru Lin, Yung-Chun Wu
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Publicado: IEEE 2019
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Acceso en línea:https://doaj.org/article/3a16f88ca06c45609218901b2951549b
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spelling oai:doaj.org-article:3a16f88ca06c45609218901b2951549b2021-11-19T00:00:54ZLow-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method2168-673410.1109/JEDS.2018.2886446https://doaj.org/article/3a16f88ca06c45609218901b2951549b2019-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/8575137/https://doaj.org/toc/2168-6734A low-voltage programmable gate-all-around (GAA) nanosheet poly-Si thin-film transistor (TFT) nonvolatile memory (NVM), which uses band-to-band tunneling induced hot electron (BBHE) programming, is demonstrated. The BBHE method is extremely efficient for programming data in the p-type GAA nanosheet TFT NVM because the GAA nanosheet structure enhances the source-to-drain component of the electric field in its channel. Therefore, the enhanced electric field of the BBHE phenomenon creates energetic electrons that surmount the tunneling oxide barrier easily and pass shallow traps in the charge trapping layer of the GAA TFT NVM. Consequently, the p-type GAA TFT NVM achieves low-voltage programming bias and satisfactory data retentionLun-Chun ChenHung-Bin ChenYu-Shuo ChangShih-Han LinMing-Hung HanJia-Jiun WuMu-Shih YehYu-Ru LinYung-Chun WuIEEEarticleBand-to-band tunneling induced hot electron (BBHE)gate-all-around (GAA)nanosheetthin-film transistor (TFT)nonvolatile memory (NVM)Electrical engineering. Electronics. Nuclear engineeringTK1-9971ENIEEE Journal of the Electron Devices Society, Vol 7, Pp 168-173 (2019)
institution DOAJ
collection DOAJ
language EN
topic Band-to-band tunneling induced hot electron (BBHE)
gate-all-around (GAA)
nanosheet
thin-film transistor (TFT)
nonvolatile memory (NVM)
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
spellingShingle Band-to-band tunneling induced hot electron (BBHE)
gate-all-around (GAA)
nanosheet
thin-film transistor (TFT)
nonvolatile memory (NVM)
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Lun-Chun Chen
Hung-Bin Chen
Yu-Shuo Chang
Shih-Han Lin
Ming-Hung Han
Jia-Jiun Wu
Mu-Shih Yeh
Yu-Ru Lin
Yung-Chun Wu
Low-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method
description A low-voltage programmable gate-all-around (GAA) nanosheet poly-Si thin-film transistor (TFT) nonvolatile memory (NVM), which uses band-to-band tunneling induced hot electron (BBHE) programming, is demonstrated. The BBHE method is extremely efficient for programming data in the p-type GAA nanosheet TFT NVM because the GAA nanosheet structure enhances the source-to-drain component of the electric field in its channel. Therefore, the enhanced electric field of the BBHE phenomenon creates energetic electrons that surmount the tunneling oxide barrier easily and pass shallow traps in the charge trapping layer of the GAA TFT NVM. Consequently, the p-type GAA TFT NVM achieves low-voltage programming bias and satisfactory data retention
format article
author Lun-Chun Chen
Hung-Bin Chen
Yu-Shuo Chang
Shih-Han Lin
Ming-Hung Han
Jia-Jiun Wu
Mu-Shih Yeh
Yu-Ru Lin
Yung-Chun Wu
author_facet Lun-Chun Chen
Hung-Bin Chen
Yu-Shuo Chang
Shih-Han Lin
Ming-Hung Han
Jia-Jiun Wu
Mu-Shih Yeh
Yu-Ru Lin
Yung-Chun Wu
author_sort Lun-Chun Chen
title Low-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method
title_short Low-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method
title_full Low-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method
title_fullStr Low-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method
title_full_unstemmed Low-Voltage Programmable Gate-All-Around (GAA) Nanosheet TFT Nonvolatile Memory Using Band-to-Band Tunneling Induced Hot Electron (BBHE) Method
title_sort low-voltage programmable gate-all-around (gaa) nanosheet tft nonvolatile memory using band-to-band tunneling induced hot electron (bbhe) method
publisher IEEE
publishDate 2019
url https://doaj.org/article/3a16f88ca06c45609218901b2951549b
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