Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling
Advances in femtosecond laser-material interaction facilitate the extension of maskless optical processing to the high efficiency and deep-subwavelength scale. Here, a hybrid plasmon lithography technique has been demonstrated by irradiating near-infrared femtosecond laser pulses onto the Si materia...
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| Main Authors: | , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
De Gruyter
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/3a6b760c2978449581ea531d252ab85d |
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